Affiliation:
1. SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, School of Electronic Science and Engineering, Southeast University, Nanjing, China
Funder
National Natural Science Foundation of China
Jiangsu Provincial Natural Science Foundation of China
Key Research and Development Program of Jiangsu Province
Fundamental Research Funds for the Central Universities
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation