Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters
Author:
Affiliation:
1. School of Microelectronics, Southern University of Science and Technology, Shenzhen, China
Funder
National Science Foundation of China
Shenzhen Science and Technology Innovation Committee
NSQKJJ
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9906516/09855862.pdf?arnumber=9855862
Reference137 articles.
1. A batch-fabricated and electret-free silicon electrostatic vibration energy harvester
2. Investigation of Multimodal Electret-Based MEMS Energy Harvester With Impact-Induced Nonlinearity
3. MEMS Vibrational Energy Harvester for IoT Wireless Sensors
4. Design and characterization of an electromagnetic energy harvester for vehicle suspensions
5. Cantilever-based electret energy harvesters
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