Low Concentration CO Gas Sensor Based on Pulsed-Heating and Wafer-Level Fabricated MEMS Hotplate
Author:
Affiliation:
1. School of Integrated Circuits, Guangdong University of Technology, Guangzhou, China
2. School of Automation, Hangzhou Dianzi University, Hangzhou, China
Funder
One Hundred Youth Project of Guangdong University of Technology
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/55/10479122/10416169.pdf?arnumber=10416169
Reference29 articles.
1. Low concentration CO gas sensor constructed from MoS2 nanosheets dispersed SnO2 nanoparticles at room temperature under UV light
2. Cobalt-doped indium oxide/molybdenum disulfide ternary nanocomposite toward carbon monoxide gas sensing
3. Selective detection of CO at room temperature with CuO nanoplatelets sensor for indoor air quality monitoring manifested by crystallinity
4. Wafer-Level Patterning of SnO Nanosheets for MEMS Gas Sensors
5. Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters
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1. NiO nanoparticles-based gas sensors: A novel pulse-driven approach for enhanced and efficient hydrogen detection;International Journal of Hydrogen Energy;2024-10
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