Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices

Author:

Heinz David B.,Hong Vu A.,Ahn Chae Hyuck,Ng Eldwin J.,Yang Yushi,Kenny Thomas W.

Funder

National Science Foundation (NSF)

Defense Advanced Research Projects Agency (DARPA) through the Precision Navigation and Timing Program managed by Dr. R. Lutwak

DARPA through the Mesodynamic Architectures Program managed by Dr. J. Rogers

NSF within Stanford Nanofabrication Facility through the National Nanotechnology Infrastructure Network

Robert Bosch Research and Technology Center

Stanford Graduate Fellowship

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

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1. Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning;Journal of Microelectromechanical Systems;2023-10

2. Deflection Modelling of MEMS Cantilever Beam Through Collocation Method Taking B-Splinesas Approximating Functions;International Journal of Social Ecology and Sustainable Development;2022-05

3. Linear and Nonlinear Mechanics in MEMS;Silicon Sensors and Actuators;2021-07-26

4. Parametric Resonators With a Floating Rotor: Sensing Strategy for Devices With an Increased Stiffness and Compact Design;Journal of Microelectromechanical Systems;2021-06

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