Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution-Reference-Cited by-同舟云学术

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Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution

Published:2016-08 Issue:4 Volume:25 Page:606-616
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Xiao Dingbang^ORCID,Zhou Xin,Li Qingsong,Hou Zhanqiang,Xi Xiang,Wu Yulie,Wu Xuezhong

Funder

National Natural Science Foundation of China

National University of Defense Technology Microsystems Laboratory

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/7526347/07469843.pdf?arnumber=7469843

Cited by 46 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Real-Time Automatic Mode-Matching Method Based on Phase-Shifted Virtual Coriolis Force for MEMS Disk Resonator Gyroscope;IEEE Sensors Journal;2023-12-01

2. Analysis and design of a fourth-order ΣΔ ADC for MEMS digital gyroscope sensors;Microelectronics Journal;2023-11

3. Pixel Antenna Optimization Using the Adjoint Method and the Method of Moving Asymptote;IEEE Transactions on Antennas and Propagation;2023-03

4. Machine learning algorithm for the structural design of MEMS resonators;Microelectronic Engineering;2023-03

5. An In-Run Automatic Mode-Matching Method With Amplitude Correction and Phase Compensation for MEMS Disk Resonator Gyroscope;IEEE Transactions on Instrumentation and Measurement;2023

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