Analysis and design of a fourth-order ΣΔ ADC for MEMS digital gyroscope sensors
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Pole-zero temperature compensation circuit design and experiment for dual-mass MEMS gyroscope bandwidth expansion;Cao;IEEE ASME Trans. Mechatron.,2019
2. Bias thermal stability improvement of mode-matching MEMS gyroscope using mode deflection;Wang;J Microelectromech. Syst.,2023
3. Optimization and experimentation of dual-mass MEMS gyroscope Quadrature error correction methods;Cao;Sensors-Basel,2016
4. A digital control structure for Lissajous frequency-modulated mode MEMS gyroscope;Wang;IEEE Sens J.,2022
5. A mode-matched DRG realized by monolithic integrated interface circuit design;Wang;IEEE Sens J.,2022
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