Method for Determining a Dynamical State–Space Model for Control of Thermal MEMS Devices-Reference-Cited by-同舟云学术

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Method for Determining a Dynamical State–Space Model for Control of Thermal MEMS Devices

Published:2005-10 Issue:5 Volume:14 Page:961-970
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Borovic B.,Lewis F.L.,Agonafer D.,Kolesar E.S.,Hossain M.M.,Popa D.O.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/32479/01516178.pdf?arnumber=1516178

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermal Analysis and Design of Electronics Systems Across Scales Using State-Space Modeling Technique;IEEE Transactions on Components, Packaging and Manufacturing Technology;2021-08

2. Macromodeling of thermally driven V-shaped MEMS actuators;Mechatronics;2017-10

3. Vibration Analysis of U-Shaped Beam Electrothermal Microactuators;2017 2nd International Conference on Cybernetics, Robotics and Control (CRC);2017-07

4. An experimentally verified model for thermal microactuators including nonlinear material properties, vacuum, and intra-device heat conduction;Journal of Micromechanics and Microengineering;2017-01-09

5. Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators;Microsystem Technologies;2016-11-11

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