Low cycle fatigue of aluminium thin films on vibrating silicon MEMS cantilevers: Highly accelerated stress test and finite element modelling

Author:

Reuther Georg M.,Pufall Reinhard,Wunderle Bernhard

Publisher

IEEE

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Low cycle fatigue of thin aluminium and copper layers and their susceptibility to corrosion;2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC);2022-09-13

2. Low Cycle Fatigue of Thin Metal Films on Vibrating Silicon MEMS Cantilevers: Finite Element Modelling Facilitating Experimental Design;2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2022-04-25

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