Dependence of Thin Oxide Films Quality on Surface Micro-Roughness-Reference-Cited by-同舟云学术

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Dependence of Thin Oxide Films Quality on Surface Micro-Roughness

Published:1991 Issue: Volume: Page:
ISSN:
Container-title:1991 Symposium on VLSI Technology
language:
Short-container-title:

Author:

Miyashita M.,Itano M.,Imaoka T.,Kawanabe I.,Ohmi T.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx4/5717/15300/00705982.pdf?arnumber=705982

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