High-Performance Wet Cleaning Technology

Author:

Ojima Senri,Morita Hiroshi,Teramoto Akinobu,Mitsumori Kenichi,Morinaga Hitoshi

Publisher

CRC Press

Reference98 articles.

1. T. Ohmi, Proposal of advanced wet cleaning of silicon surface, in:Extended Abstracts of 188th Electrochemical Society Meeting, Chicago, No. 429, pp.680 -681, 1995.

2. M. Miyashita, M. Itano, T. Imaoka, I. Kawanabe, and T. Ohmi, Optimized NH4OH/H2O2cleaning process for ultraclean wafer surface preparation, in:Extended Abstracts of the 179th Electrochemical Society Meeting, Washington, DC, No. 463, pp.709 - 710, 1991.

3. M. Miyashita, M. Itano, T. Imaoka, I. Kawanabe, and T. Ohmi, Dependence of thin oxide films quality on surface microroughness. in:1991 Symposium on VLSI Technology, Oiso, pp.45-46, 1991.

4. Dependence of thin-oxide films quality on surface microroughness

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