Ferroelectric Gate Stack Engineering with Tunnel Dielectric Insert for Achieving High MemoryWindow in FEFETs for NAND Applications
Author:
Affiliation:
1. Georgia Tech,USA
2. Samsung Electronics Co. Ltd,South Korea
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10511270/10511310/10511400.pdf?arnumber=10511400
Reference11 articles.
1. 3D NAND Scaling in the next decade
2. CMOS-compatible ferroelectric NAND flash memory for high-density, low-power, and high-speed three-dimensional memory
3. (Invited) 3D-NAND Reliability: Review of key mechanisms and mitigations
4. Reliability of 3D NAND Flash for Future Storage Systems (Invited)
5. First demonstration of ferroelectric Si:HfO2 based 3D FE-FET with trench architecture for dense nonvolatile memory application
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