Fabrication of zirconium nitride thin film for cryogenic temperature sensors
Author:
Affiliation:
1. TKM College of Engineering,Department of Electronics & Communication Engineering,Kollam,Kerala
2. Cochin University of Science and Technology,Department of Electronics School of Engineering,Cochin,Kerala
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10038981/10039721/10040152.pdf?arnumber=10040152
Reference18 articles.
1. Effects of Nitrogen Content on the Structural, Mechanical,and Corrosion Properties of ZrN Thin Films Grown on AISI316L by Radiofrequency Magnetron Sputtering;azibi;Cryst Res Technology Journal Wiley,2021
2. Magnetron sputtering: a review of recent developments and applications;kelly;Vaccum,2000
3. Reactive magnetron sputtering of thin films: present status and trends
4. Sputtering deposition and characterization of zirconium nitride and oxynitride films
5. Cryogenic Temperature Sensors
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