Concept for Manufacturing a Microoptoelectromechanical Micro-G Accelerometer-Reference-Cited by-同舟云学术

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Concept for Manufacturing a Microoptoelectromechanical Micro-G Accelerometer

Published:2022-11-17 Issue: Volume: Page:
ISSN:
Container-title:2022 International Siberian Conference on Control and Communications (SIBCON)
language:
Short-container-title:

Author:

Barbin Evgenij S.¹,Nesterenko Tamara G.¹,Koleda Aleksej N.¹,Shesterikov Evgeniy V.¹,Kulinich Ivan V.¹,Kokolov Andrey²

Affiliation:

1. The Tomsk State University of Control Systems and Radioelectronics,Laboratory of Radiophotonics

2. The Tomsk State University of Control Systems and Radioelectronics,Institute of Optics and Atmosphere, Siberian Branch of the Russian Academy of Sciences,Tomsk,Russia

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10002870/10002871/10002971.pdf?arnumber=10002971

Reference21 articles.

1. Design and Demonstration of an In-Plane Silicon-on-Insulator Optical MEMS Fabry–Pérot-Based Accelerometer Integrated With Channel Waveguides

2. MEMS Fabry–Pérot optical accelerometer employing mechanical amplification via a V-beam structure

3. An Optical MEMS Accelerometer Based on a Two-Dimensional Photonic Crystal Add-Drop Filter

4. A high-resolution microchip optomechanical accelerometer

5. Estimating the Sensitivity of Microoptoelectromechanical Micro-g Accelerometer;barbin;International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices,2022

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