MEMS Fabry–Pérot optical accelerometer employing mechanical amplification via a V-beam structure-Reference-Cited by-同舟云学术

MEMS Fabry–Pérot optical accelerometer employing mechanical amplification via a V-beam structure

Published:2014-08 Issue: Volume:215 Page:22-29
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Davies Edward,George David S.,Gower Malcolm C.,Holmes Andrew S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference30 articles.

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4. Micromachined, fiber-optic based accelerometer with shutter modulation;Guldimann,2000

5. BESOI-based integrated optical silicon accelerometer;Plaza;J. Microelectromech. Syst.,2004

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