Deep-UVsensors based on SAW oscillators using low-temperature-grown AlN films on sapphires-Reference-Cited by-同舟云学术

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Deep-UVsensors based on SAW oscillators using low-temperature-grown AlN films on sapphires

Published:2011-08 Issue:8 Volume:58 Page:1688-1693
ISSN:0885-3010
Container-title:IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
language:
Short-container-title:IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Author:

Laksana Chipta P.,Chen Meei-ru,Liang Yen,Tzou An-jyeg,Kao Hui-ling,Jeng Erik S.,Chen Jyh Shin,Chen Hou-guang,Jian Sheng-rui

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/58/5995201/05995227.pdf?arnumber=5995227

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors;IEEE Sensors Journal;2023-04-15

2. Cu3N thin film synthesized by selective in situ substrate heating during high power impulse magnetron sputtering for augmenting UV photodetection;Sensors and Actuators A: Physical;2023-02

3. Mechanistic insights into low-temperature epitaxial growth of aluminum nitride films on layered transition metal dichalcogenides;Journal of Vacuum Science & Technology A;2022-12

4. Large Scale Integration of Functional Radio‐Frequency Flexible MEMS under Large Mechanical Strain;Advanced Functional Materials;2022-11-28

5. Photoresponse of the AlN-Based SAW Device on Polymeric and Silicon Substrates;IEEE Sensors Journal;2021-04-15

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