Large Scale Integration of Functional Radio‐Frequency Flexible MEMS under Large Mechanical Strain-Reference-Cited by-同舟云学术

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Large Scale Integration of Functional Radio‐Frequency Flexible MEMS under Large Mechanical Strain

Published:2022-11-28 Issue:4 Volume:33 Page:2205404
ISSN:1616-301X
Container-title:Advanced Functional Materials
language:en
Short-container-title:Adv Funct Materials

Author:

Azrak Edy¹,Michaud Laurent¹,Richy Jérôme¹,Reinhardt Alexandre¹,Tardif Samuel²,Eymery Joël²,Bousquet Marie¹,Fournel Frank¹,Montmeat Pierre¹^ORCID

Affiliation:

1. Université Grenoble Alpes Commissariat à l'Energie Atomique Laboratoire d'Electronique et de Technologie de l'Information F‐38000 Grenoble France

2. Université Grenoble Alpes Commissariat à l'Energie Atomique Institut de Recherche Interdisciplinaire de Grenoble MEM NRS F‐38000 Grenoble France

Publisher

Wiley

Subject

Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adfm.202205404

Reference50 articles.

1. Band structure and fundamental optical transitions in wurtzite AlN

2. Near vacuum-ultraviolet aperiodic oscillation emission of AlN films

3. Deep-UVsensors based on SAW oscillators using low-temperature-grown AlN films on sapphires

4. Strained GaN quantum-well FETs on single crystal bulk AlN substrates

5. Demonstration of AlN Schottky Barrier Diodes With Blocking Voltage Over 1 kV

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigation of the morphology and structural transformation of 6H-SiC induced by a single femtosecond laser pulse;Optics & Laser Technology;2024-09

2. Galerkin-FEM approach for dynamic recovering of the plate profile in electrostatic MEMS with fringing field;COMPEL - The international journal for computation and mathematics in electrical and electronic engineering;2024-05-31

3. Magnetoelectric Functionality of Ni–Mn–In-Encapsulated AlN/Ni–Mn–In/Ni-Graded Heterostructure for Flexible Magnetic Field Sensor;ACS Applied Electronic Materials;2023-11-27

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