Harnessing Acoustic Dispersions in YX-LN/SiO2/Si SH-SAW Resonators for Electromechanical Coupling Optimization and Rayleigh Mode Suppression
Author:
Affiliation:
1. Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
Funder
National Science and Technology Council (NSTC) of Taiwan
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/58/10360424/10305222.pdf?arnumber=10305222
Reference40 articles.
1. Acoustic Wave Filter Technology–A Review
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4. Golden Age for Filter Design: Innovative and Proven Approaches for Acoustic Filter, Duplexer, and Multiplexer Design
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1. Spectrum-Clean Dispersion-Engineered YX-LN/SiO₂/Si Wideband SH-SAW Resonators With Crossed Interdigital Transducers;IEEE Transactions on Electron Devices;2024-06
2. Higher Order Mode Elimination for SAW Resonators Based on LiNbO₃/SiO₂/poly-Si/Si Substrate by Si Orientation Optimization;Journal of Microelectromechanical Systems;2024-04
3. L-Band LiNbO3/SiO2/Sapphire Longitudinal Leaky Saw (LLSAW) Resonators with High Figure of Merit;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
4. A Dispersion-Engineered YX-LN/SIO2/Sapphire SH-SAW Resonator for Enhanced Electromechanical Coupling and Rayleigh Mode Suppression;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
5. Monolithic 1–6-GHz Multiband Acoustic Filters Using SH-SAW and LLSAW on LiNbO$_{3}$/SiO$_{2}$/SiC Platform;IEEE Transactions on Microwave Theory and Techniques;2024
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