Voltage Control Ratiometric Readout Technique With Improved Dynamic Range and Power-Efficiency for Open-Loop MEMS Capacitive Accelerometer
Author:
Affiliation:
1. Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi’an, China
2. School of Computing, Engineering and Digital Technologies, Teesside University, Middlesbrough, U.K.
Funder
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Hardware and Architecture
Link
http://xplorestaging.ieee.org/ielx7/8919/9985434/09875967.pdf?arnumber=9875967
Reference47 articles.
1. 9.5 A 1.8 V true-differential 140dB SPL full-scale standard CMOS MEMS digital microphone exhibiting 67dB SNR;bach;IEEE Int Solid-State Circuits Conf (ISSCC) Dig Tech Papers,2017
2. A Parasitic Insensitive Catheter-Based Capacitive Force Sensor for Cardiovascular Diagnosis
3. Bandwidth-Enhanced Oversampling Successive Approximation Readout Technique for Low-Noise Power-Efficient MEMS Capacitive Accelerometer
4. 16.5 A 13b 0.005 mm2 40MS/s SAR ADC with kT/C noise cancellation;liu;IEEE Int Solid-State Circuits Conf (ISSCC) Dig Tech Papers,2020
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