Discrete event simulation modeling for semiconductor fabrication operation-Reference-Cited by-同舟云学术

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Discrete event simulation modeling for semiconductor fabrication operation

Published:2014-08 Issue: Volume: Page:
ISSN:
Container-title:2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)
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Author:

Chik M A,Rahim A B,Rejab A Z Md,Ibrahim K,Hashim U.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6912063/6920764/06920863.pdf?arnumber=6920863

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Hyperparameter Tuning with Gaussian Processes for Optimal Abstraction Control in Simulation-based Optimization of Smart Semiconductor Manufacturing Systems;ACM Transactions on Modeling and Computer Simulation;2024-02-17

2. Introduction to Latest Fabrication Techniques;Handbook of Emerging Materials for Semiconductor Industry;2024

3. Hyperparameter Tunning in Simulation-based Optimization for Adaptive Digital-Twin Abstraction Control of Smart Manufacturing System;SIGSIM Conference on Principles of Advanced Discrete Simulation;2022-06-08

4. Experimental Quantification of Electrostatic Damage (ESD) in Binary Reticle with Feature of Nanometre Scale Gaps;PRZEGLĄD ELEKTROTECHNICZNY;2022-03-07

5. Weighted grey relational analysis to evaluate multilevel dispatching rules in wafer fabrication;Grey Systems: Theory and Application;2021-01-28

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