Throughput Optimization of Fast Processing Tools Using a Dispatching Algorithm-Reference-Cited by-同舟云学术

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Throughput Optimization of Fast Processing Tools Using a Dispatching Algorithm

Published:2019-05 Issue: Volume: Page:
ISSN:
Container-title:2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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Author:

Chakravorty Shiladitya,Wribhu Atirek

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8781947/8791743/08791797.pdf?arnumber=8791797

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Real-Time Balancing of WIP for Compatible Capacities Across Distant Fab Buildings Using Automated Cross-Location Decisions;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13

2. Hafnium Chloride Pulse Time Reduction on Atomic Layer Deposited High-K HfO2 Dielectric Films;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13

3. Multi-Objective Sort Job Optimization for Wafer Bonding Tools;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13

4. Big Data Analytics for Real Time Dispatch;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13

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