Real-time diagnosis of semiconductor manufacturing equipment using a hybrid neural network expert system-Reference-Cited by-同舟云学术

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Real-time diagnosis of semiconductor manufacturing equipment using a hybrid neural network expert system

Published:1997 Issue:1 Volume:20 Page:39-47
ISSN:1083-4400
Container-title:IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part C
language:
Short-container-title:IEEE Trans. Comp., Packag., Manufact. Technol. C

Author:

Kim B.,May G.S.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

General Engineering

Link

http://xplorestaging.ieee.org/ielx1/3476/12673/00585143.pdf?arnumber=585143

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