A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT-Reference-Cited by-同舟云学术

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A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

Published:2019-06 Issue: Volume: Page:
ISSN:
Container-title:2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
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Author:

Wang Haoran,Li Mengyuan,Yu Yuanyuan,Chen Zhenfang,Ding Yingtao,Jiang Huabei,Xie Huikai

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8787960/8808173/08808528.pdf?arnumber=8808528

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Bandwidth enhancement of piezoelectric MEMS microspeaker via central diaphragm actuation and filter integration;Journal of Micromechanics and Microengineering;2024-08-28

2. Effect of LiSbO3 and SrZrO3 doping on the piezoelectric properties and microstructural behavior of K0.5Na0.5NbO3 ceramics;Journal of the Korean Ceramic Society;2024-01-18

3. MEMS audio speakers ^*;Journal of Micromechanics and Microengineering;2023-11-29

4. High performance piezoelectric MEMS loudspeaker based on an innovative wafer bonding process;Sensors and Actuators A: Physical;2023-08

5. Low-cost piezo-MEMS speaker technology;Micro and Nano Engineering;2023-06

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