Author:
Tassetti C.-M.,Peyssonneaux O.,Mahieu R.,Danel J.-S.,Progent F.,Machuron-Mandard X.,Duraffourg L.
Cited by
3 articles.
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1. Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer;2024 37th International Vacuum Nanoelectronics Conference (IVNC);2024-07-15
2. MEMS quadrupole mass spectrometer;Sensors and Actuators B: Chemical;2024-07
3. MEMS mass spectrometers: the next wave of miniaturization;Journal of Micromechanics and Microengineering;2016-01-08