A 0.1 DEG/H Module-Level Silicon Mems Rate Integrating Gyroscope Using Virtually Rotated Donut-Mass Structure and Demonstration of the Earth's Rotation Detection-Reference-Cited by-同舟云学术

A 0.1 DEG/H Module-Level Silicon Mems Rate Integrating Gyroscope Using Virtually Rotated Donut-Mass Structure and Demonstration of the Earth's Rotation Detection

Published:2021-06-20 Issue: Volume: Page:
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Container-title:2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
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Author:

Miyazaki Fumito,Gando Ryunosuke,Ono Daiki,Kaji Shiori,Ota Hiroshi,Hiraga Hiroki,Masunishi Kei,Ogawa Etsuji,Itakura Tetsuro,Tomizawa Yasushi

Funder

New Energy and Industrial Technology Development Organization (NEDO)

Toshiba Electro-wave Products Co., Ltd

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495598.pdf?arnumber=9495598

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