Single-Chip Integration of CMOS Compatible Mems Temperature/Humidity and Highly Sensitive Flow Sensors for Human Thermal Comfort Sensing Application-Reference-Cited by-同舟云学术

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Single-Chip Integration of CMOS Compatible Mems Temperature/Humidity and Highly Sensitive Flow Sensors for Human Thermal Comfort Sensing Application

Published:2021-06-20 Issue: Volume: Page:
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Container-title:2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
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Author:

Izhar ,Xu Wei,Tavakkoli Hadi,Cabot Jose,Zhao Xu,Duan Mingzheng,Lee Yi-Kuen

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495565.pdf?arnumber=9495565

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Highly Integrated Lab-on-a-CMOS Platform for Real-Time Monitoring of E. Coli Growth Kinetics;IEEE Transactions on Biomedical Circuits and Systems;2024-02

2. Monolithic Integration of Humidity/Flow/Temperature Sensors As Environment Sensing Hub for Apparent-Temperature Detection;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

3. CMOS Compatible MEMS Multienvironmental Sensor Chip for Human Thermal Comfort Measurement in Smart Buildings;IEEE Transactions on Electron Devices;2022-11

4. Design Optimization of CMOS- MEMS Staggered Vertical Comb Based Micro Scanners;2022 IEEE Sensors;2022-10-30

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