Funder
Lam Research Corporation
Semiconductor Technology Advanced Research Network (STARnet) Function Accelerated nanoMaterial Engineering
Stanford Initiative for Nanoscale Materials and Processes (INMP) Industrial Affiliate Program
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
28 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献