Low-temperature growth of nanocrystalline graphene on metal thin films-Reference-Cited by-同舟云学术

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Low-temperature growth of nanocrystalline graphene on metal thin films

Published:2024-05 Issue: Volume:318 Page:129280
ISSN:0254-0584
Container-title:Materials Chemistry and Physics
language:en
Short-container-title:Materials Chemistry and Physics

Author:

Shin Keun Wook^ORCID,Lee Chang-Seok^ORCID,Lee Eun-Kyu^ORCID,Yang Eunji,Lee Hyangsook,Kwon Junyoung^ORCID,Byun Kyung-Eun^ORCID

Publisher

Elsevier BV

Reference26 articles.

1. 1-nm-thick graphene tri-layer as the ultimate copper diffusion barrier;Nguyen;Appl. Phys. Lett.,2014

2. Vertical and lateral copper transport through graphene layers;Li;ACS Nano,2015

3. Transfer-free multi-layer graphene as a diffusion barrier;Mehta;Nanoscale,2017

4. Fabrication of metal/graphene hybrid interconnects by direct graphene growth and their integration properties;Lee;Adv. Electron. Mater.,2018

5. Pulsed KrF laser-assisted direct deposition of graphitic capping layer for Cu interconnect;Cho;Carbon,2017

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