A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate-Reference-Cited by-同舟云学术

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A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate

Published:2002-12 Issue:12 Volume:23 Page:700-703
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Liang Y.C.,Wenjiang Zeng ,Pick Hong Ong ,Zhaoxia Gao ,Jun Cai ,Balasubramanian N.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/55/26458/01177953.pdf?arnumber=1177953

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