Silicon-Embedding Approaches to 3-D Toroidal Inductor Fabrication-Reference-Cited by-同舟云学术

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Silicon-Embedding Approaches to 3-D Toroidal Inductor Fabrication

Published:2013-06 Issue:3 Volume:22 Page:580-588
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Yu Xuehong,Kim Minsoo,Herrault Florian,Ji Chang-Hyeon,Kim Jungkwung,Allen Mark G.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/6521375/06401141.pdf?arnumber=6401141

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A detailed study of Qdc of 3D micro air-core inductors for integrated power supplies: Power supply in package (PSiP) and power supply on chip (PSoC);Power Electronic Devices and Components;2022-06

2. MEMS-Casting Fabricated Chip-Style 3D Metal Solenoidal Transformers towards Integrated Power Supply;Micromachines;2022-02-18

3. Highly anisotropic magneto responsive SU8/Fe ink for additive manufacturing;Journal of Magnetism and Magnetic Materials;2022-01

4. Design, Modeling, and Analysis of a 3-D Spiral Inductor With Magnetic Thin-Films for PwrSoC/PwrSiP DC-DC Converters;IEEE Access;2022

5. A micro-electromagnetic vibration energy harvester with higher power density and wider bandwidth utilizing 3D MEMS coils;Applied Physics Letters;2021-11-22

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