A Proposal for an Ultracompact Single-Layer MOEMS Accelerometer Based on Evanescent Coupling between Parallel Silicon Nanowaveguides
Author:
Affiliation:
1. North University of China,School of Instrument and Electronics,Taiyuan,China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10088439/10088450/10088753.pdf?arnumber=10088753
Reference10 articles.
1. Modeling bending losses of optical nanofibers or nanowires
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5. Review of micromachined optical accelerometers: from mg to sub-?g;lu;Adv Opto Electr,2021
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1. A Compensator Microelectromechanical Acceleration Transducer with a Piezoelectric Sensing Element and Optical Reading;Journal of the Russian Universities. Radioelectronics;2024-03-01
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