Author:
Kawata H.,Yasuda M.,Hirai Y.
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Research of ultra high aspect ratio silicon etching in the advanced process;2022 China Semiconductor Technology International Conference (CSTIC);2022-06-20
2. High aspect ratio silicon etch: A review;Journal of Applied Physics;2010-09