Buried Power Rail Metal exploration towards the 1 nm Node-Reference-Cited by-同舟云学术

Buried Power Rail Metal exploration towards the 1 nm Node

Published:2021-12-11 Issue: Volume: Page:
ISSN:
Container-title:2021 IEEE International Electron Devices Meeting (IEDM)
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Author:

Gupta A.¹,Radisic D.¹,Maes J. W.²,Pedreira O. Varela¹,Soulie J-P.¹,Jourdan N.¹,Mertens H.¹,Bandyopadhyay S.¹,Le Q. T.¹,Pacco A.¹,Heylen N.¹,Vandersmissen K.¹,Devriendt K.¹,Zhu C.³,Datta S.³,Sebaai F.¹,Wang S.¹,Mousa M.⁴,Lee J.⁴,Geypen J.¹,De Wachter B.¹,Chehab B.¹,Salahuddin S. M.¹,Murdoch G.¹,Biesemans S.¹,Tokei Zs.¹,Litta E. Dentoni¹,Horiguchi N.¹

Affiliation:

1. imec vzw,Leuven,Belgium,B-3001

2. ASM Belgium NV,Leuven,Belgium,B-3001

3. ASM Microchemistry Oy,Helsinki,Finland

4. ASM America Inc, 3440 East University Drive,Phoenix,AZ,USA

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9720433/9720494/09720684.pdf?arnumber=9720684

Reference8 articles.

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