Author:
Uno Yutaka,Narise K.,Masuda T.,Inoue K.,Adachi Y.,Hosoya K.,Seki T.,Sato F.
Cited by
25 articles.
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3. Introduction to Radio Frequency Micro Electromechanical Systems;Lecture Notes in Electrical Engineering;2022
4. 4 W Power MEMS Relay With Extremely Low Contact Resistance: Theoretical Analysis, Design and Demonstration;Journal of Microelectromechanical Systems;2020-10
5. 4 W Dual-Contact Material MEMS Relay with a Contact Force Maximizing Structure;2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS);2020-01