1. Bernstein J, Cho S, King AT, Kourepenis A, Maciel P, Weinberg M (1993) A micromachined comb-drive tuning fork rate gyroscope micro electro mechanical systems. In: Proceedings of the IEEE international conference on micro electro mechanical systems MEMS, Fort Lauderdale, pp 143–148
2. Ziegler V, Siegel C, Schonlinner B, Prechtel U, Schumacher H (2005) RF-MEMS switches based on a low-complexity technology and related aspects of MMIC integration. In: Proceedings of the European gallium arsenide and other semiconductor application symposium EGAAS, Paris, pp 289–292
3. Aratani K, French PJ, Sarro PM, Wolffenbuttel RF, Middelhoek S (1993) Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon. In: Proceedings of the IEEE international conference on micro electro mechanical systems MEMS, Fort Lauderdale, pp 230–235
4. De Los Santos HJ, Fischer G, Tilmans HAC (2004) van Beek JTM RF MEMS for ubiquitous wireless connectivity: part II–Application. IEEE Mirowave Mag 5(4):50–65
5. Rebeiz GM (2003) RF MEMS theory, design and technique (book). Wiley