MEMS tunable Fabry-Perot Filters with thick, two sided optical coatings
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/5271854/5285368/05285853.pdf?arnumber=5285853
Cited by 27 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Infrared and terahertz spectrally adaptive filters based on MEMS technologies;Smart Photonic and Optoelectronic Integrated Circuits 2023;2023-03-17
2. A Subwavelength-Grating-Mirror-Based MEMS Tunable Fabry-Perot Filter for Hyperspectral Infrared Imaging;Journal of Microelectromechanical Systems;2023-02
3. Large-aperture, widely and linearly tunable, electromagnetically actuated MEMS Fabry-Perot filtering chips for longwave infrared spectral imaging;Optics Express;2022-11-03
4. Investigation and process control of the grating fill-factor and sidewall angle impacts on 2-D metamaterial infrared mirrors;Optical Materials Express;2022-10-03
5. A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters;Journal of Microelectromechanical Systems;2022-08
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