Affiliation:
1. Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory
2. Nanjing University of Aeronautics and Astronautics
3. The University of Western Australia
Abstract
We report the first study of the effects of grating fill-factor variation and sidewall angle on 2-D subwavelength grating shortwave infrared mirrors, and the first development of a geometry compensation approach to correct for the grating fill-factor patterning error caused by EBL proximity effect and a plasma etching process based on CHF3 passivation to control grating sidewall angle. Mirrors with a large grating air-hole diameter-to-pitch ratio of 0.954 and vertical sidewall angle of 89.8° are demonstrated with an average reflectivity of 99% over an ultrabroad wavelength range of 560 nm (1.92-2.48 µm), which represents an unprecedented fractional bandwidth of 26%.
Funder
National Natural Science Foundation of China
Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory
Fundamental Research Funds for the Central Universities
Social Science Foundation of Jiangsu Province
Australian Research Council
Subject
Electronic, Optical and Magnetic Materials