Sapphire-based capacitance diaphragm gauge for high temperature applications-Reference-Cited by-同舟云学术

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Sapphire-based capacitance diaphragm gauge for high temperature applications

Published: Issue: Volume: Page:
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Container-title:The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
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Author:

Ishihara T.,Sekine M.,Ishikura Y.,Kimura S.,Harada H.,Nagata M.,Masuda T.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/9993/32108/01496464.pdf?arnumber=1496464

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MEMS Self-Packaged Capacitive Absolute Pressure and Force Sensors for High-Temperature Application;2022 IEEE Sensors;2022-10-30

2. Direct Bonding;3D and Circuit Integration of MEMS;2021-04-23

3. A High-Temperature Optical Sapphire Pressure Sensor For Harsh Environments;AIAA Scitech 2019 Forum;2019-01-06

4. Laser Brazing Between Sapphire and Inconel 600;The Advances in Joining Technology;2018-05-23

5. Surface activated room-temperature bonding in Ar gas ambient for MEMS encapsulation;Japanese Journal of Applied Physics;2017-12-28

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