Energy efficient F atom generation and control in CF<sub>4</sub> capacitively coupled plasmas driven by tailored voltage waveforms-Reference-Cited by-同舟云学术

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Energy efficient F atom generation and control in CF₄ capacitively coupled plasmas driven by tailored voltage waveforms

Published:2024-06-16 Issue: Volume: Page:1-1
ISSN:
Container-title:2024 IEEE International Conference on Plasma Science (ICOPS)
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Author:

Wang X.-K.¹,Masheyeva R.²,Liu Y.-X.¹,Song Y.-H.¹,Hartmann P.²,Donkó Z.²,Schulze J.³

Affiliation:

1. Dalian University of Technology,Physics Department,Dalian,China

2. Institute for Solid State Physics and Optics,Wigner Research Centre for Physics,Budapest,Hungary

3. Ruhr University Bochum,Department of Electrical Engineering and Information Science,Bochum,North Rhine-Westphalia,Germany

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

China Scholarship Council

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10625766/10625775/10626121.pdf?arnumber=10626121

Reference1 articles.

1. Absolute fluorine atom concentrations in fluorocarbon plasmas determined from CF2 loss kinetics

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