A ${\rm Z}$-Axis Quartz Tuning Fork Micromachined Gyroscope Based on Shear Stress Detection-Reference-Cited by-同舟云学术

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A ${\rm Z}$-Axis Quartz Tuning Fork Micromachined Gyroscope Based on Shear Stress Detection

Published:2012-05 Issue:5 Volume:12 Page:1246-1252
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Wu Xuezhong,Xie Liqiang,Xing Jianchun,Dong Peitao,Wang Haoxu,Su Jianbin

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/7361/6178352/05975194.pdf?arnumber=5975194

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Mode Matched Tuning Fork Gyroscope Using ScAlN-Based Piezoelectric Driving And Sensing;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02

2. Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications;INCAS BULLETIN;2023-09-04

3. Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure;Micromachines;2022-01-24

4. Sensor Design Migration: The Case of a VRG;IEEE Sensors Journal;2019-11-15

5. Fabrication of a novel quartz micromachined gyroscope;AIP Advances;2015-04

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