Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications-Reference-Cited by-同舟云学术

Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications

Published:2023-09-04 Issue:3 Volume:15 Page:57-71
ISSN:2247-4528
Container-title:INCAS BULLETIN
language:en
Short-container-title:INCAS BULLETIN

Author:

MUSTATA Stefan-Mircea¹,VIDAN Cristian²,LARCO Ciprian-Marius³,BOGLIS Carmen-Ioana⁴,ANTOFIE Bianca-Gabriela⁵

Affiliation:

1. Military Technical Academy “Ferdinand I”, 39-49 George Cosbuc Blvd., Sector 5, Bucharest 050142, Romania, stmustata@yahoo.com

2. Military Technical Academy “Ferdinand I”, 39-49 George Cosbuc Blvd., Sector 5, Bucharest 050142, Romania and University Politehnica of Bucharest, Faculty of Aerospace Engineering, 1-7 Polizu Street, Sector 1, Bucharest 011061, România, and University Politehnica of Bucharest, Faculty of Aerospace Engineering, 1-7 Polizu Street, Sector 1, Bucharest 011061, România, vidan.cristian@yahoo.com

3. Military Technical Academy “Ferdinand I”, 39-49 George Cosbuc Blvd., Sector 5, Bucharest 050142, Romania, ciprian_larco@yahoo.com

4. University Politehnica of Bucharest, Faculty of Aerospace Engineering, 1-7 Polizu Street, Sector 1, Bucharest 011061, România, bogliscarmen@gmail.com

5. Military Technical Academy “Ferdinand I”, 39-49 George Cosbuc Blvd., Sector 5, Bucharest 050142, Romania, antofiebianca@gmail.com

Abstract

Given the advantages in terms of weight, size and cost and because it can withstand severe shocks and temperature changes, the MEMS/NEMS sensors are widely used in the aerospace domain. This paper presents a brief history of the scientists who made reference to micro and nano technologies for the first time, followed by a synthesis of the leading technologies used in the manufacture of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) intensively used in aerospace industry. After reviewing the latest technologies used in the manufacture of MEMS/NEMS sensors, the paper continues with predicting the current state regarding the development of NEMS and MEMS, respectively.

Publisher

INCAS - National Institute for Aerospace Research Elie Carafoli

Subject

Aerospace Engineering,Control and Systems Engineering

Reference45 articles.

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