A Physics-Based Model of Charge Trapping Behavior of Si FeFET With Metal/Ferroelectric/Interlayer/Si Structure

Author:

Sun Xiaoqing1ORCID,Chai Junshuai1ORCID,Tian Fengbin1ORCID,Zhao Shujing2ORCID,Duan Jiahui1ORCID,Xiang Jinjuan3,Han Kai4ORCID,Xu Hao1ORCID,Wang Xiaolei1ORCID,Wang Wenwu5

Affiliation:

1. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China

2. School of Microelectronics, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an, China

3. Beijing Superstring Academy of Memory Technology, Beijing, China

4. School of Physics and Electronic Information, Weifang University, Weifang, China

5. Bureau of Major Research and Development Program Chinese Academy of Sciences, Beijing, China

Funder

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

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