1. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
2. School of Microelectronics, Faculty of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an, China
3. Beijing Superstring Academy of Memory Technology, Beijing, China
4. School of Physics and Electronic Information, Weifang University, Weifang, China
5. Bureau of Major Research and Development Program Chinese Academy of Sciences, Beijing, China