1. School of Micro-Nano Electronics, Zhejiang University, Hangzhou, China
2. School of Microelectronics and the Hangzhou Institute of Technology, Xidian University, Xi’an, China
3. Technology Innovation and Training Center, Polytechnic Institute, Zhejiang University, Hangzhou, China
4. Institute of Microelectronics of Chinese Academy of Sciences, University of Chinese Academy of Sciences, Beijing, China