Fabrication Process for Monolithic Integration of a Nitride Superconductor-Based Superconducting Qubit with a Single Flux Quantum Control Circuit-Reference-Cited by-同舟云学术

Fabrication Process for Monolithic Integration of a Nitride Superconductor-Based Superconducting Qubit with a Single Flux Quantum Control Circuit

Author:

Miyajima Shigeyuki¹^ORCID,Yamashita Taro²,Tanaka Masamitsu³^ORCID,Takeuchi Naoki⁴^ORCID,Inomata Kunihiro⁴^ORCID,Terai Hirotaka¹

Affiliation:

1. Advanced ICT Research Institute, National Institute of Information and Communications Technology, Kobe, Japan

2. Department of Applied Physics, Tohoku University, Sendai, Japan

3. Department of Electronics, Nagoya University, Nagoya, Japan

4. Research Center for Emerging Computing Technologies, National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan

Funder

JSPS KAKENHI

MEXT Q-LEAP

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

Reference16 articles.

4. Pattern-size-free planarization for multilayered large-scale SFQ circuits;hinode;IEICE Trans Electron,2003

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