Fabrication of deep-sub-micrometer NbN/AlN/NbN epitaxial junctions on a Si-substrate
Author:
Funder
Core Research for Evolutional Science and Technology
Exploratory Research for Advanced Technology
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
https://iopscience.iop.org/article/10.35848/1882-0786/abbfde/pdf
Reference27 articles.
1. IEEE Transactions on Applied Superconductivity upcoming special conference issues
2. Design and Fabrication of All-NbN SFQ Circuits for SSPD Signal Processing
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