In-Situ Degradation Monitoring of Sputtered Thin Al Films on Si Cantilevers Inside SEM During Accelerated Stress Testing using Nano-Indenter Actuation and Vibration Loading-Reference-Cited by-同舟云学术

In-Situ Degradation Monitoring of Sputtered Thin Al Films on Si Cantilevers Inside SEM During Accelerated Stress Testing using Nano-Indenter Actuation and Vibration Loading

Published:2021-09-23 Issue: Volume: Page:
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Container-title:2021 27th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC)
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Author:

Johrmann Nathanael,Osipova Valentina,Breitenreiner Sebastian,Pufall Reinhard,Wunderle Bernhard

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9626389/9626393/09626510.pdf?arnumber=9626510

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5. High-Cycle Fatigue Testing of thin Metal Films on MEMS Cantilever;2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2022-04-25