A Framework for Semi-Automated Fault Detection Configuration with Automated Feature Extraction and Limits Setting
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IEEE
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http://xplorestaging.ieee.org/ielx7/9180248/9185190/09185395.pdf?arnumber=9185395
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Cross-Chamber Data Transferability Evaluation for Fault Detection and Classification in Semiconductor Manufacturing;IEEE Transactions on Semiconductor Manufacturing;2023-02
2. A hyper-heuristic inspired approach for automatic failure prediction in the context of industry 4.0;Computers & Industrial Engineering;2022-09
3. Profile Abstract: An Optimization-based Subset Selection and Summarization Method for Profile Data Mining;IEEE Transactions on Industrial Informatics;2022
4. Combining Feature Extraction-Based and Full Trace Analysis Capabilities in Fault Detection: Methods and Comparative Analysis;2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2021-05-10
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