Author:
Mishra Shiv Kumar,Geiss Erik,Kumar Aditya,Malinowski Arkadiusz,Zhi Gao Wen,Lin Wenhe,Indajang Bangun,Slisher Dustin
Cited by
5 articles.
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1. Optimization of FINFET Single Diffusion Break Structure Profile;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13
2. Deep Active Genetic Learning-Based Assessment of Lakes’ Water Quality Using Climate Data;IEEE Transactions on Sustainable Computing;2022-10-01
3. Yield Improvement Methodology with addressing Design Systematics during Production Ramp-up;2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2022-05-02
4. Accelerating FinFET MOL Process Development Using Design for Inspection Methodology;2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2022-05-02
5. A Metal Gate Height Variation Control Method by the Metal Gate Etch at the FinFET Technology;2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2022-05-02