Author:
Patterson Oliver D.,Peng Hsiao-Chi,Hu Haokun,Huang Chih-Chung,Venkatachalam Panneer S.
Cited by
2 articles.
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1. Novel Control Method and Applications for Negative Mode E-Beam Inspection;IEEE Transactions on Semiconductor Manufacturing;2023-08
2. Negative Mode E-Beam Inspection of the Contact Layer;2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2022-05-02