A mm-Wave Trilayer AlN/ScAlN/AlN Higher Order Mode FBAR
Author:
Affiliation:
1. Electrical Engineering and Computer Science Department, The University of Michigan, Ann Arbor, MI, USA
Funder
Defense Advanced Research Projects Agency (DARPA), COmpact Front-end Filters at the ElEment-level
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/9944983/10144809/10123411.pdf?arnumber=10123411
Reference16 articles.
1. Fully epitaxial ferroelectric ScAlN grown by molecular beam epitaxy
2. Wurtzite ScAlN, InAlN, and GaAlN crystals, a comparison of structural, elastic, dielectric, and piezoelectric properties
3. Intrinsically Tunable Laminated Ferroelectric Scandium Aluminum Nitride Extensional Resonator Based on Local Polarization Switching
4. Modified Butterworth-Van Dyke circuit for FBAR resonators and automated measurement system
5. Erratum: Piezoelectric eofficients and spontaneous polarization of ScAlN;caro;J Phys Condens Matter,2015
Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Piezoelectric Microacoustic Metamaterial Filters;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2024-09
2. A 19 GHz All-Epitaxial Al₀.₈Sc₀.₂N Cascaded FBAR for RF Filtering Applications;IEEE Electron Device Letters;2024-07
3. A 56 GHz Trilayer AlN/ScAlN/AlN Periodically Poled FBAR;2024 IEEE/MTT-S International Microwave Symposium - IMS 2024;2024-06-16
4. Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band;Sensors;2024-05-05
5. Design and Fabrication of 3.5 GHz Band-Pass Film Bulk Acoustic Resonator Filter;Micromachines;2024-04-25
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3