Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing-Reference-Cited by-同舟云学术

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Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing

Published:2021-01-25 Issue: Volume: Page:
ISSN:
Container-title:2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Ng Doris K. T.,Ho Chong-Pei,Xu Linfang,Zhang Tantan,Siow Li-Yan,Ng Eldwin J.,Cai Hong,Zhang Qingxin,Lee Lennon Y. T.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9375130/9375148/09375435.pdf?arnumber=9375435

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. CMOS AlN and ScAlN Pyroelectric Detectors with Optical Enhancement for Detection of CO₂ and CH₄ Gases;Advanced Electronic Materials;2023-06-23

2. Low-power contactless button system based on MEMS ScAlN pyroelectric detector;MOEMS and Miniaturized Systems XXII;2023-03-15

3. Miniaturized CO₂ Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector;ACS Sensors;2022-08-09

4. NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector;Sensors and Actuators B: Chemical;2021-11

5. CO2Gas Sensing By Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption;2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers);2021-06-20

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